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Award for extreme-UV lithography research

Powerlase has been appointed a Medallion Member of the Industrial Affiliates programme at the University of Central Florida. The award acknowledges Powerlase's contribution to research into extreme ultraviolet lithography at the university.

Extreme ultraviolet lithography is a promising technique for semiconductor machining at wavelengths of less than 32nm. The collaboration has yielded impressive results with two lasers multiplexed together for the first time to increase the power of the EUV source.

Dr Samir Ellwi, vice president of strategic innovation at Powerlase, said: 'Perfecting the EUVL technique is vital to ensure adoption by the semiconductor industry and we are confident this can be achieved through our ground breaking partnership with UCF.'

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