Stil has introduced the CL0-MG210 optical pen. The pen has a depth of field of 70µm, a working distance of 2.6mm, an NA of approximately 0.67, an axial resolution of approximately 5nm and lateral resolution of 0.9µm. The CL0-MG210 is suitable for high resolution measurements from MEMs to microbumps and even nano-roughness.
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