Plasma monitoring with modular, high-resolution spectroscopy

A modular spectroscopy setup based on an Ocean Insight HR series high resolution spectrometer was used to monitor changes in argon plasma emission following the introduction of different gases to a plasma chamber. The measurements demonstrated the viability of modular spectroscopy components to acquire plasma emission spectra in real time from a plasma chamber. Plasma characteristics determined from these emission spectra can be used for monitoring and controlling plasmabased processes.

A modular spectroscopy setup based on an Ocean Insight HR series high resolution spectrometer was used to monitor changes in argon plasma emission following the introduction of different gases to a plasma chamber. The measurements demonstrated the viability of modular spectroscopy components to acquire plasma emission spectra in real time from a plasma chamber. Plasma characteristics determined from these emission spectra can be used for monitoring and controlling plasmabased processes.